2025-10-04 04:02:30 +08:00
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<!DOCTYPE html>
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<html lang="zh-CN">
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<head>
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<meta charset="UTF-8">
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<meta name="viewport" content="width=device-width, initial-scale=1.0">
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<title>半导体AI综合检测项目 - 化工订单班</title>
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<link rel="stylesheet" href="css/styles.css">
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<script src="https://unpkg.com/lucide@latest/dist/umd/lucide.min.js"></script>
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</head>
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<body class="dark-theme">
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<!-- 主题切换按钮 -->
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<div class="theme-toggle">
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<button id="themeToggleBtn" class="theme-toggle-btn">
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<i data-lucide="sun" class="theme-icon theme-icon-light"></i>
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<i data-lucide="moon" class="theme-icon theme-icon-dark"></i>
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</button>
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</div>
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<!-- Hero 区域 -->
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<section class="hero">
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<div class="hero-content">
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<div class="hero-badge">🔬 化工订单班</div>
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<h1 class="hero-title">半导体AI综合检测项目</h1>
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<h2 class="hero-subtitle">300mm硅晶圆 + SiO₂薄膜智能质检</h2>
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<p class="hero-description">
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<i data-lucide="cpu"></i> AI驱动的全流程自动化检测<br>
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<i data-lucide="bot"></i> 4大专业Agent协同作业<br>
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<i data-lucide="check-circle"></i> 95%合格率 + 智能质量预警
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</p>
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</div>
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</section>
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<!-- 导航栏 -->
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<nav class="nav">
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<div class="nav-container">
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<div class="nav-item active">
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<i data-lucide="file-text"></i>
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<span>项目概述</span>
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</div>
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<div class="nav-item">
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<i data-lucide="clipboard-check"></i>
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<span>判定标准</span>
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</div>
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<div class="nav-item">
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<i data-lucide="workflow"></i>
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<span>检测流程</span>
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</div>
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<div class="nav-item">
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<i data-lucide="chart-line"></i>
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<span>检测结果</span>
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</div>
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</div>
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</nav>
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<!-- Section 1: 项目概述 -->
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<section class="section">
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<div class="container">
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<div class="section-header">
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<img src="agent-avatars/质量标准与合规专家.jpg" alt="项目经理" class="agent-avatar">
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<div class="agent-info">
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<div class="agent-name">
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<i data-lucide="briefcase"></i> 项目经理
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</div>
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<h2 class="section-title">项目概述与检测背景</h2>
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</div>
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</div>
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<div class="section-content">
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2025-10-10 14:25:07 +08:00
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<!-- Alternating Layout: 左图右文 -->
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<div class="alternating-layout">
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<div class="image-container">
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<img data-src="images/检测背景主图.jpg" alt="检测背景" loading="lazy">
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<div class="image-caption">AI驱动的智能检测系统</div>
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</div>
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<div class="content">
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<h3 class="card-title"><i data-lucide="info"></i> 检测背景</h3>
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<p style="color: var(--text-secondary); font-size: 15px; line-height: 1.8; margin-top: var(--spacing-md);">
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本项目对单批次 <strong>300mm 硅晶圆 + 表面SiO₂薄膜</strong>开展一次性质量检测。检测的核心目标是在不打乱生产节拍的前提下，快速、客观地给出放行/拦截结论，并将证据图与关键数据同步打包，便于管理层与工艺同事直接引用。
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</p>
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<p style="color: var(--text-secondary); font-size: 15px; line-height: 1.8; margin-top: var(--spacing-sm);">
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整套流程由<strong>AI引擎主导</strong>：它负责数据清洗（去噪、校正）、主判定（是否达标/进入观察/越界）与自动出具结构化报告；检测员只在低可信或越界时介入复核，最大化保障速度与一致性。
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</p>
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</div>
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2025-10-04 04:02:30 +08:00
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</div>
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<div class="grid grid-2">
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<div class="card">
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<div class="card-header">
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<h3 class="card-title">检测目的</h3>
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</div>
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<div class="card-body">
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<ul class="feature-list">
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<li><i data-lucide="check-circle"></i> 外观:识别颗粒、划痕、腐蚀缺陷</li>
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<li><i data-lucide="check-circle"></i> 薄膜:核对厚度均值与均匀性</li>
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<li><i data-lucide="check-circle"></i> 电学:快速评估方块电阻Rs</li>
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<li><i data-lucide="check-circle"></i> 成分:XPS抽检确认O/Si比</li>
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</ul>
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</div>
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</div>
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2025-10-10 14:25:07 +08:00
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<!-- 检测目的详细说明 -->
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<div class="card" style="grid-column: 1 / -1;">
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<div class="card-header">
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<h3 class="card-title"><i data-lucide="target"></i> 检测目的详细说明</h3>
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</div>
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<div class="card-body">
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<div class="grid grid-2" style="gap: var(--spacing-lg);">
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<div>
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<h4 style="font-size: 16px; font-weight: 600; margin-bottom: var(--spacing-sm); color: var(--text-primary);">
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<i data-lucide="eye" style="width: 18px; height: 18px;"></i> 1. 外观检测
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</h4>
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<p style="color: var(--text-secondary); font-size: 14px; line-height: 1.6;">
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识别并量化颗粒、划痕、腐蚀等可见缺陷，输出数量、最大尺寸、位置分布与可信度；若出现同象限集中或边缘聚集，在报告中加注"需关注"提示，便于下批定位复测。
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</p>
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</div>
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<div>
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<h4 style="font-size: 16px; font-weight: 600; margin-bottom: var(--spacing-sm); color: var(--text-primary);">
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<i data-lucide="layers" style="width: 18px; height: 18px;"></i> 2. 薄膜测量
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</h4>
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<p style="color: var(--text-secondary); font-size: 14px; line-height: 1.6;">
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用9点法核对厚度均值与均匀性(3σ)是否满足目标窗口；当整体达标但边缘点偏离明显时，自动标记"边缘敏感"，提示下批优先复查对应区域。
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</p>
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</div>
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<div>
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<h4 style="font-size: 16px; font-weight: 600; margin-bottom: var(--spacing-sm); color: var(--text-primary);">
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<i data-lucide="zap" style="width: 18px; height: 18px;"></i> 3. 电学测试
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</h4>
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<p style="color: var(--text-secondary); font-size: 14px; line-height: 1.6;">
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以"AI预测+少量点实测校准"的组合快速评估Rs；当均值接近上/下限或离散度异常放大时，报告中会给出"观察或需复核"的明确结论与建议点位。
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</p>
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</div>
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<div>
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<h4 style="font-size: 16px; font-weight: 600; margin-bottom: var(--spacing-sm); color: var(--text-primary);">
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<i data-lucide="atom" style="width: 18px; height: 18px;"></i> 4. 成分分析
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</h4>
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<p style="color: var(--text-secondary); font-size: 14px; line-height: 1.6;">
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进行小样本XPS抽检，确认O/Si比是否落在目标范围，并筛查金属污染的可疑峰位；若低于阈值但出现弱峰，记为"可疑"，建议同片位或邻近点复测。
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</p>
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</div>
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</div>
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</div>
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</div>
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2025-10-04 04:02:30 +08:00
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<div class="card">
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<div class="card-header">
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<h3 class="card-title">检测信息</h3>
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</div>
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<div class="card-body">
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<ul class="feature-list">
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<li><i data-lucide="building"></i> XX半导体第三方实验室</li>
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<li><i data-lucide="calendar"></i> 2024年10月</li>
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<li><i data-lucide="file-text"></i> AI-QC-202410-001</li>
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<li><i data-lucide="package"></i> 300mm P型硅晶圆 20片</li>
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</ul>
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</div>
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</div>
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</div>
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<div class="table-container" style="margin-top: var(--spacing-xl);">
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<table>
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<thead>
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<tr>
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<th>项目</th>
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<th>信息</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>产品</td>
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<td>300mm P型硅晶圆(表面SiO₂薄膜)</td>
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</tr>
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<tr>
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<td>批次/数量</td>
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<td>同批随机抽样20片</td>
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</tr>
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<tr>
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<td>目标规格</td>
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<td>SiO₂ 15.0±0.3nm; Rs 60±1.2Ω/□</td>
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</tr>
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<tr>
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<td>环境</td>
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<td>ISO 5洁净室,温度22±1℃,湿度45±5%</td>
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</tr>
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<tr>
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<td>AI设置</td>
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<td>可信度阈值:≥0.90合格,0.80-0.90观察,<0.80待复核</td>
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</tr>
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</tbody>
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</table>
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</div>
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</div>
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</div>
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</section>
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<!-- Section 2: 判定标准 -->
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<section class="section">
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<div class="container">
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<div class="section-header">
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<img src="agent-avatars/质量标准与合规专家.jpg" alt="质量工程师" class="agent-avatar">
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<div class="agent-info">
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<div class="agent-name">
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<i data-lucide="shield-check"></i> 质量工程师
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</div>
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<h2 class="section-title">检测范围与判定标准</h2>
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</div>
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</div>
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<div class="section-content">
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2025-10-10 14:25:07 +08:00
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<!-- Alternating Layout: 右图左文 (自动反向) -->
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<div class="alternating-layout">
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<div class="image-container">
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<img data-src="images/硅晶圆检测项目.jpg" alt="检测项目" loading="lazy">
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<div class="image-caption">硅晶圆检测项目全景</div>
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</div>
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<div class="content">
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<h3 class="card-title"><i data-lucide="target"></i> 检测对象与项目</h3>
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<ul class="feature-list" style="margin-top: var(--spacing-md);">
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<li><i data-lucide="circle-dot"></i> <strong>样品类型：</strong>300mm硅晶圆 + 表面SiO₂薄膜</li>
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<li><i data-lucide="eye"></i> <strong>外观检测：</strong>颗粒、划痕、腐蚀等可见缺陷</li>
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<li><i data-lucide="layers"></i> <strong>薄膜测量：</strong>厚度均值与均匀性(3σ)</li>
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<li><i data-lucide="zap"></i> <strong>电学测试：</strong>方块电阻Rs(9点法)</li>
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<li><i data-lucide="atom"></i> <strong>成分分析：</strong>XPS抽检(O/Si比、金属污染)</li>
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<li><i data-lucide="shield-off"></i> <strong>不在范围：</strong>晶体位错、深层缺陷、应力拉曼</li>
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</ul>
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<p style="margin-top: var(--spacing-md); padding: var(--spacing-md); background: var(--bg-semi-dark); border-radius: var(--radius-md); border-left: 3px solid var(--accent-primary); font-size: 14px; color: var(--text-secondary);">
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<i data-lucide="info" style="width: 16px; height: 16px;"></i>
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<strong>结果使用：</strong>仅服务当批放行/拦截，不外推其他批次或不同工艺窗口。
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</p>
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</div>
|
2025-10-04 04:02:30 +08:00
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</div>
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<div class="table-container">
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<table>
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<thead>
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<tr>
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<th>项目</th>
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<th>指标</th>
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<th>判定阈值/范围</th>
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<th>统计口径</th>
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<th>结论规则</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>外观</td>
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<td>颗粒(≥0.3μm)</td>
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<td>≤35颗/片</td>
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<td>每片最大值、总数</td>
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<td>超过即不合格</td>
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</tr>
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<tr>
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<td>外观</td>
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<td>划痕</td>
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<td>>50μm计缺陷</td>
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<td>最大长度</td>
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<td>45-50μm观察</td>
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</tr>
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<tr>
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<td>外观</td>
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<td>腐蚀坑深度</td>
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<td>>10nm不合格</td>
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<td>最大深度</td>
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<td>8-10nm观察;≤8nm合格</td>
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</tr>
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<tr>
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<td>薄膜</td>
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<td>厚度均值</td>
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<td>15.0±0.3nm</td>
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<td>9点均值</td>
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<td>超出窗口即不合格</td>
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</tr>
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<tr>
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<td>薄膜</td>
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<td>均匀性(3σ)</td>
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<td>≤±3%</td>
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<td>9点3σ</td>
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<td>>3%不合格;2.5-3%观察</td>
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</tr>
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<tr>
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<td>电学</td>
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<td>Rs均值</td>
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<td>60±1.2Ω/□</td>
|
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|
|
<td>9点均值</td>
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|
<td>超出窗口不合格</td>
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|
|
</tr>
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<tr>
|
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|
|
<td>成分</td>
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|
|
<td>O/Si比</td>
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|
|
<td>2.00±0.05</td>
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<td>抽检值</td>
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<td>超出为异常;贴边观察</td>
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</tr>
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<tr>
|
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|
<td>成分</td>
|
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|
<td>金属污染</td>
|
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|
<td><1×10¹⁰atoms/cm²</td>
|
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|
|
<td>抽检值</td>
|
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<td>超阈即异常</td>
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</tr>
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</tbody>
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</table>
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</div>
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|
<div class="stats" style="margin-top: var(--spacing-xl);">
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|
<div class="stat-item">
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|
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<div class="stat-label">判定优先级</div>
|
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|
<div class="stat-value">外观 > 薄膜 > 电学 > 成分</div>
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</div>
|
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|
|
<div class="stat-item">
|
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|
<div class="stat-label">AI参与方式</div>
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|
<div class="stat-value">自动阈值比对</div>
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</div>
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|
<div class="stat-item">
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|
<div class="stat-label">人工复核触发</div>
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<div class="stat-value">临界/低可信</div>
|
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</div>
|
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</div>
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</div>
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</div>
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</section>
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|
|
|
|
|
<!-- Section 3: 检测流程 -->
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|
<section class="section">
|
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|
<div class="container">
|
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|
<div class="section-header">
|
|
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|
|
<img src="agent-avatars/检测工程师1+2.jpg" alt="AI系统工程师" class="agent-avatar">
|
|
|
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|
|
<div class="agent-info">
|
|
|
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|
|
<div class="agent-name">
|
|
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|
|
<i data-lucide="bot"></i> AI系统工程师
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<h2 class="section-title">检测流程与AI方法</h2>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
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|
|
|
|
|
<div class="section-content">
|
|
|
|
|
|
<div class="expert-intro">
|
|
|
|
|
|
<h3><i data-lucide="workflow"></i> 流程总览</h3>
|
|
|
|
|
|
<p>AI数据采集 → AI清洗数据 → AI主判定 → AI对标阈值 → 必要时人工复核 → 自动生成报告。单片目标用时≤6分钟,批次(20片)约1.5小时完成核心判定。</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div class="image-container" style="margin-bottom: var(--spacing-xl);">
|
|
|
|
|
|
<img data-src="images/光学镜头检测硅晶圆示意图.jpg" alt="检测流程" loading="lazy">
|
|
|
|
|
|
<div class="image-caption">光学镜头检测硅晶圆示意</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- AI输出内容：Featured Item 样式 -->
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="grid grid-4">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- 卡片1: 外观热力图 -->
|
|
|
|
|
|
<div class="card featured-item">
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="image-container">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<img data-src="images/外观热力图（颗粒划痕腐蚀）.jpg" alt="外观热力图" loading="lazy">
|
|
|
|
|
|
<div class="image-caption">AI输出图表 1/4</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-header">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<h3 class="card-title">
|
|
|
|
|
|
<i data-lucide="thermometer"></i>
|
|
|
|
|
|
外观热力图
|
|
|
|
|
|
</h3>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body">
|
|
|
|
|
|
<p>整片俯视图+网格热区,颗粒/划痕/腐蚀坑分类显示,颜色分级标注严重度。</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- 卡片2: 厚度分布图 -->
|
|
|
|
|
|
<div class="card featured-item">
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="image-container">
|
|
|
|
|
|
<img data-src="images/厚度分布图.jpg" alt="厚度分布图" loading="lazy">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<div class="image-caption">AI输出图表 2/4</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-header">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<h3 class="card-title">
|
|
|
|
|
|
<i data-lucide="layers"></i>
|
|
|
|
|
|
厚度分布图
|
|
|
|
|
|
</h3>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body">
|
|
|
|
|
|
<p>9点热力格,均值、3σ、偏移率统计,边缘敏感性自动标注。</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- 卡片3: 电学对比图 -->
|
|
|
|
|
|
<div class="card featured-item">
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="image-container">
|
|
|
|
|
|
<img data-src="images/电学对比图.jpg" alt="电学对比图" loading="lazy">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<div class="image-caption">AI输出图表 3/4</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-header">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<h3 class="card-title">
|
|
|
|
|
|
<i data-lucide="zap"></i>
|
|
|
|
|
|
电学对比图
|
|
|
|
|
|
</h3>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body">
|
|
|
|
|
|
<p>AI预测vs实测散点图,误差统计,置信区间可视化展示。</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- 卡片4: 成分抽检 -->
|
|
|
|
|
|
<div class="card featured-item">
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="image-container">
|
|
|
|
|
|
<img data-src="images/成分抽检卡片.jpg" alt="成分抽检" loading="lazy">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<div class="image-caption">AI输出图表 4/4</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-header">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<h3 class="card-title">
|
|
|
|
|
|
<i data-lucide="atom"></i>
|
|
|
|
|
|
成分抽检卡片
|
|
|
|
|
|
</h3>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<div class="card-body" style="order: 3; padding: 0 var(--spacing-lg) var(--spacing-lg); font-size: 14px;">
|
|
|
|
|
|
<p style="margin: 0; color: var(--text-secondary); line-height: 1.6;">O/Si比值、金属污染状态,峰位截图,采样位置追溯。</p>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|
|
|
|
|
<h3><i data-lucide="cpu"></i> AI判定规则</h3>
|
|
|
|
|
|
<div class="grid grid-3" style="margin-top: var(--spacing-md);">
|
|
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title">≥0.90且达标 → 合格</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
|
|
|
|
|
<p>自动出报告并归档,无需人工处理。</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
|
|
|
|
|
|
<!-- 测点最少化策略 -->
|
|
|
|
|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|
|
|
|
|
<h3><i data-lucide="minimize-2"></i> 测点最少化策略</h3>
|
|
|
|
|
|
<div class="grid grid-2" style="margin-top: var(--spacing-md); gap: var(--spacing-lg);">
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<h4 class="card-title">✅ 默认做法：9点测量</h4>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<p style="margin-bottom: var(--spacing-sm);">厚度和Rs用9点（中心1点+内环4点+外环4点），能覆盖重点区域，也不太费时。</p>
|
|
|
|
|
|
<p style="font-size: 14px; color: var(--text-secondary);">💡 <strong>"少测点"方法：</strong>如果AI预测和前3点实测的差异<2%，剩下6点可以用AI估算。报告里必须标注这些点为"AI估计"，同时随机抽查1-2点，以确保靠谱。</p>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
|
2025-10-04 04:02:30 +08:00
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<h4 class="card-title">⚠️ 不能少测点的情况</h4>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<ul class="feature-list" style="font-size: 14px;">
|
|
|
|
|
|
<li><i data-lucide="alert-triangle"></i> 某一象限的缺陷/颗粒明显偏多</li>
|
|
|
|
|
|
<li><i data-lucide="alert-triangle"></i> 边缘和中心差距异常（边缘普遍偏高或偏低）</li>
|
|
|
|
|
|
<li><i data-lucide="alert-triangle"></i> 前3点与AI预测差异≥2%</li>
|
|
|
|
|
|
</ul>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-sm); font-size: 14px; color: var(--text-secondary);">遇到这些情况，系统会自动恢复<strong>完整9点</strong>；必要时建议升到<strong>13点</strong>（外环再加4点）再确认。</p>
|
2025-10-04 04:02:30 +08:00
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</div>
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</div>
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</div>
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</div>
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|
2025-10-10 14:25:07 +08:00
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<!-- AI输出内容详解：简洁卡片样式 -->
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<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
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|
<h3><i data-lucide="image"></i> AI输出内容详解</h3>
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</div>
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<!-- Grid 2x2 简洁卡片布局 -->
|
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<div class="grid grid-2" style="margin-top: var(--spacing-lg); gap: var(--spacing-xl);">
|
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|
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<!-- 1. 外观热力图 -->
|
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<div class="card featured-item">
|
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<div class="image-container">
|
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<img data-src="images/外观热力图（颗粒划痕腐蚀）.jpg" alt="外观热力图" loading="lazy">
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</div>
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<div class="card-header">
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<h3 class="card-title">
|
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<i data-lucide="thermometer"></i>
|
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外观热力图
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</h3>
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</div>
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<div class="card-body">
|
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<p><strong>展示：</strong>整片俯视图+网格热区，颗粒/划痕/腐蚀分类显示，绿/橙/红颜色分级</p>
|
|
|
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|
|
<p><strong>读图：</strong>①看红橙区是否集中 ②确认最大尺寸位置 ③判断分布随机性</p>
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</div>
|
2025-10-04 04:02:30 +08:00
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</div>
|
2025-10-10 14:25:07 +08:00
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<!-- 2. 厚度分布图 -->
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<div class="card featured-item">
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<div class="image-container">
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<img data-src="images/厚度分布图.jpg" alt="厚度分布图" loading="lazy">
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</div>
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<div class="card-header">
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<h3 class="card-title">
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<i data-lucide="layers"></i>
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厚度分布图
|
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</h3>
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</div>
|
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|
<div class="card-body">
|
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|
<p><strong>组成：</strong>9点热力格（冷→暖=薄→厚），统计卡（均值/3σ/偏移率），达标徽记</p>
|
|
|
|
|
|
<p><strong>要点：</strong>3σ≤±3%且偏移率接近0为稳定，边缘敏感标记提示复测</p>
|
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</div>
|
2025-10-04 04:02:30 +08:00
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</div>
|
2025-10-10 14:25:07 +08:00
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<!-- 3. 电学对比图 -->
|
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<div class="card featured-item">
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<div class="image-container">
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<img data-src="images/电学对比图.jpg" alt="电学对比图" loading="lazy">
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</div>
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<div class="card-header">
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<h3 class="card-title">
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<i data-lucide="zap"></i>
|
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电学对比图
|
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</h3>
|
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</div>
|
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|
<div class="card-body">
|
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|
<p><strong>元素：</strong>散点图（AI预测vs实测），45°参考线，误差统计（MAE/MAPE）</p>
|
|
|
|
|
|
<p><strong>判读：</strong>靠近45°线=准确，上方偏多=低估，下方偏多=高估</p>
|
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</div>
|
2025-10-04 04:02:30 +08:00
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</div>
|
2025-10-10 14:25:07 +08:00
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<!-- 4. 成分抽检卡片 -->
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<div class="card featured-item">
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|
<div class="image-container">
|
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<img data-src="images/成分抽检卡片.jpg" alt="成分抽检" loading="lazy">
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</div>
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<div class="card-header">
|
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<h3 class="card-title">
|
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|
<i data-lucide="atom"></i>
|
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|
成分抽检卡片
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</h3>
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</div>
|
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|
<div class="card-body">
|
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|
|
|
<p><strong>项目：</strong>O/Si比值（2.00±0.05），金属污染（<1×10¹⁰atoms/cm²），峰位截图</p>
|
|
|
|
|
|
<p><strong>状态：</strong>正常（窗口内）、可疑（弱峰低于阈值）、异常（超出范围）</p>
|
|
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|
|
</div>
|
2025-10-04 04:02:30 +08:00
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</div>
|
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</div>
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</div>
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</section>
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|
<!-- Section 4: 检测结果 -->
|
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|
<section class="section">
|
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|
<div class="container">
|
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|
<div class="section-header">
|
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|
<img src="agent-avatars/检测技术员.jpg" alt="数据分析师" class="agent-avatar">
|
|
|
|
|
|
<div class="agent-info">
|
|
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|
<div class="agent-name">
|
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|
<i data-lucide="chart-line"></i> 数据分析师
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<h2 class="section-title">检测结果与数据分析</h2>
|
|
|
|
|
|
</div>
|
|
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|
|
|
</div>
|
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|
<div class="section-content">
|
|
|
|
|
|
<div class="expert-intro">
|
|
|
|
|
|
<h3><i data-lucide="clipboard-check"></i> 批次摘要</h3>
|
|
|
|
|
|
<p>本批共20片晶圆,全部完成外观、厚度、Rs三项检测;随机抽取3片补做XPS成分核验。完成度100%,无漏测、无中断记录。总体判定:合格19片、观察1片、不合格0片。</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- 批次摘要详细说明 -->
|
|
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|
|
|
<div class="grid grid-3" style="margin-top: var(--spacing-lg); gap: var(--spacing-md);">
|
|
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|
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|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title"><i data-lucide="check-square"></i> 覆盖范围与完成度</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2; font-size: 14px;">
|
|
|
|
|
|
<p>本批共20片晶圆，全部按计划完成<strong>外观、厚度、方块电阻(Rs)</strong>三项检测；随机抽取3片补做XPS成分核验。</p>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-xs); color: var(--text-secondary);">外观采用全片扫描（单片分辨率约0.2-0.3μm/px），厚度与Rs采用9点法（中心+内环4点+外环4点），与晶圆Notch对齐确保点位一致性。</p>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-xs); color: var(--accent-primary); font-weight: 600;">✓ 完成度100%，无漏测、无中断记录。</p>
|
|
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|
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|
</div>
|
|
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|
</div>
|
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|
<div class="card">
|
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|
|
<div class="card-header" style="order: 1;">
|
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|
|
|
<h4 class="card-title"><i data-lucide="bar-chart-2"></i> 统计口径与一致性</h4>
|
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|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2; font-size: 14px;">
|
|
|
|
|
|
<ul class="feature-list">
|
|
|
|
|
|
<li><i data-lucide="eye"></i> <strong>外观：</strong>每片"最大值"与"总数"呈现（便于快速对比风险峰值与整体水平）</li>
|
|
|
|
|
|
<li><i data-lucide="layers"></i> <strong>厚度与Rs：</strong>9点"均值+3σ(离散)"呈现</li>
|
|
|
|
|
|
<li><i data-lucide="atom"></i> <strong>成分：</strong>按"正常/可疑/异常"分级，并附O/Si比与金属峰提示</li>
|
|
|
|
|
|
</ul>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-xs); color: var(--text-secondary);">各项统计口径与上一版报告保持一致，便于横向对比。</p>
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|
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|
</div>
|
|
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|
</div>
|
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|
<div class="card">
|
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|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title"><i data-lucide="pie-chart"></i> 总体判定与分布</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2; font-size: 14px;">
|
|
|
|
|
|
<p>结果汇总：<strong style="color: var(--success-color);">合格19片</strong>、<strong style="color: var(--warning-color);">观察1片</strong>、<strong style="color: var(--error-color);">不合格0片</strong>。</p>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-xs);">进入"观察"的样片原因为<strong>Rs略高但未越界</strong>；其余19片全部在阈值内。</p>
|
|
|
|
|
|
<div class="stats" style="margin-top: var(--spacing-md);">
|
|
|
|
|
|
<div class="stat-item" style="flex: 1;">
|
|
|
|
|
|
<div class="stat-label">合格率</div>
|
|
|
|
|
|
<div class="stat-value" style="color: var(--success-color);">95%</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="stat-item" style="flex: 1;">
|
|
|
|
|
|
<div class="stat-label">观察率</div>
|
|
|
|
|
|
<div class="stat-value" style="color: var(--warning-color);">5%</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
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|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<!-- Alternating Layout: 检测结果可视化 -->
|
|
|
|
|
|
<div class="alternating-layout">
|
|
|
|
|
|
<div class="image-container">
|
|
|
|
|
|
<img data-src="images/检测结果主图.jpg" alt="检测结果" loading="lazy">
|
|
|
|
|
|
<div class="image-caption">检测结果数据可视化</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="content">
|
|
|
|
|
|
<h3 class="card-title"><i data-lucide="bar-chart-4"></i> 检测结果总览</h3>
|
|
|
|
|
|
<div class="grid grid-2" style="margin-top: var(--spacing-md); gap: var(--spacing-md);">
|
|
|
|
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|
<div style="padding: var(--spacing-md); background: var(--bg-semi-dark); border-radius: var(--radius-md);">
|
|
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|
<div style="font-size: 32px; font-weight: bold; color: var(--success-color);">95%</div>
|
|
|
|
|
|
<div style="font-size: 14px; color: var(--text-secondary); margin-top: 4px;">批次合格率</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div style="padding: var(--spacing-md); background: var(--bg-semi-dark); border-radius: var(--radius-md);">
|
|
|
|
|
|
<div style="font-size: 32px; font-weight: bold; color: var(--primary);">0.94</div>
|
|
|
|
|
|
<div style="font-size: 14px; color: var(--text-secondary); margin-top: 4px;">AI可信度</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div style="padding: var(--spacing-md); background: var(--bg-semi-dark); border-radius: var(--radius-md);">
|
|
|
|
|
|
<div style="font-size: 32px; font-weight: bold; color: var(--warning-color);">1片</div>
|
|
|
|
|
|
<div style="font-size: 14px; color: var(--text-secondary); margin-top: 4px;">观察片数</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div style="padding: var(--spacing-md); background: var(--bg-semi-dark); border-radius: var(--radius-md);">
|
|
|
|
|
|
<div style="font-size: 32px; font-weight: bold; color: var(--text-gray);">0片</div>
|
|
|
|
|
|
<div style="font-size: 14px; color: var(--text-secondary); margin-top: 4px;">不合格片数</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-md); padding: var(--spacing-sm); background: var(--success-bg, rgba(76, 175, 80, 0.1)); border-radius: var(--radius-md); border-left: 3px solid var(--success-color); font-size: 14px;">
|
|
|
|
|
|
<i data-lucide="check-circle" style="width: 16px; height: 16px;"></i>
|
|
|
|
|
|
<strong>总体评价：</strong>本批质量稳定，仅1片进入观察带，AI与人工判定结果100%一致。
|
|
|
|
|
|
</p>
|
|
|
|
|
|
</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div class="table-container">
|
|
|
|
|
|
<table>
|
|
|
|
|
|
<thead>
|
|
|
|
|
|
<tr>
|
|
|
|
|
|
<th>判定</th>
|
|
|
|
|
|
<th>片数</th>
|
|
|
|
|
|
<th>占比</th>
|
|
|
|
|
|
<th>主要原因/特征</th>
|
|
|
|
|
|
<th>处置</th>
|
|
|
|
|
|
</tr>
|
|
|
|
|
|
</thead>
|
|
|
|
|
|
<tbody>
|
|
|
|
|
|
<tr>
|
|
|
|
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|
<td>合格</td>
|
|
|
|
|
|
<td>19</td>
|
|
|
|
|
|
<td>95%</td>
|
|
|
|
|
|
<td>指标均在阈值内;外观颗粒小、分散</td>
|
|
|
|
|
|
<td>直接归档</td>
|
|
|
|
|
|
</tr>
|
|
|
|
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|
<tr>
|
|
|
|
|
|
<td>观察</td>
|
|
|
|
|
|
<td>1</td>
|
|
|
|
|
|
<td>5%</td>
|
|
|
|
|
|
<td>Rs接近上限,离散正常;外观、厚度均达标</td>
|
|
|
|
|
|
<td>下批优先复测</td>
|
|
|
|
|
|
</tr>
|
|
|
|
|
|
<tr>
|
|
|
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|
<td>不合格</td>
|
|
|
|
|
|
<td>0</td>
|
|
|
|
|
|
<td>0%</td>
|
|
|
|
|
|
<td>—</td>
|
|
|
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|
<td>—</td>
|
|
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|
</tr>
|
|
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|
|
|
</tbody>
|
|
|
|
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|
</table>
|
|
|
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</div>
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<div class="table-container" style="margin-top: var(--spacing-xl);">
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<table>
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<thead>
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<tr>
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<th>指标</th>
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<th>结果</th>
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<th>阈值</th>
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<th>判定</th>
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<th>备注</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>颗粒(≥0.3μm,颗/片)</td>
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<td>24</td>
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<td>≤35</td>
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<td>合格</td>
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<td>主要集中在3象限外环</td>
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</tr>
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<tr>
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<td>划痕(最大长度,μm)</td>
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<td>48</td>
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<td>>50计缺陷</td>
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<td>合格</td>
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<td>单条、细长型,非功能区</td>
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</tr>
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<tr>
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<td>腐蚀坑深度(nm)</td>
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<td>8.6</td>
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<td>≤10</td>
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<td>合格</td>
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<td>无环形腐蚀迹象</td>
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</tr>
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<tr>
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<td>SiO₂厚度均值(nm)</td>
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<td>15.07</td>
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|
<td>15.0±0.3</td>
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|
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<td>合格</td>
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<td>偏移率+0.47%</td>
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|
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</tr>
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<tr>
|
|
|
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<td>厚度均匀性3σ(%)</td>
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|
<td>±2.6</td>
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|
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|
|
<td>≤±3.0</td>
|
|
|
|
|
|
<td>合格</td>
|
|
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|
|
|
<td>边缘敏感:否</td>
|
|
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|
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|
</tr>
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<tr>
|
|
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|
|
|
<td>Rs均值(Ω/□)</td>
|
|
|
|
|
|
<td>61.1</td>
|
|
|
|
|
|
<td>60±1.2</td>
|
|
|
|
|
|
<td>观察</td>
|
|
|
|
|
|
<td>+1.1(略高),离散2.9Ω/□</td>
|
|
|
|
|
|
</tr>
|
|
|
|
|
|
<tr>
|
|
|
|
|
|
<td>XPS O/Si原子比</td>
|
|
|
|
|
|
<td>2.02</td>
|
|
|
|
|
|
<td>2.00±0.05</td>
|
|
|
|
|
|
<td>合格</td>
|
|
|
|
|
|
<td>3片抽检均正常</td>
|
|
|
|
|
|
</tr>
|
|
|
|
|
|
<tr>
|
|
|
|
|
|
<td>金属污染(atoms/cm²)</td>
|
|
|
|
|
|
<td><7×10⁹</td>
|
|
|
|
|
|
<td><1×10¹⁰</td>
|
|
|
|
|
|
<td>合格</td>
|
|
|
|
|
|
<td>未见可疑峰</td>
|
|
|
|
|
|
</tr>
|
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|
|
|
</tbody>
|
|
|
|
|
|
</table>
|
|
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|
|
|
</div>
|
|
|
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|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|
|
|
|
|
<h3><i data-lucide="lightbulb"></i> 结论与建议</h3>
|
|
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|
|
<div class="grid grid-2" style="margin-top: var(--spacing-md);">
|
|
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title">总体判定</h4>
|
|
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|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
|
|
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|
|
<p>最终结论:<strong>合格</strong>。本批20片中,仅1片进入观察带(Rs均值略高但未越界),其余指标均在阈值内。AI主判定平均可信度0.94,异常触发的人工复核与AI结果一致。</p>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-sm);">放行建议:本批可整体放行。对"观察片"在生产流转单上加注"下批优先复测"标识。</p>
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|
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</div>
|
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|
|
|
</div>
|
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|
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|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
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|
|
<h4 class="card-title">快速优化建议</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
|
|
|
|
|
<p>若后续批次仍出现Rs略高,可尝试:</p>
|
|
|
|
|
|
<ul class="feature-list" style="margin-top: var(--spacing-sm);">
|
|
|
|
|
|
<li><i data-lucide="arrow-down"></i> 沉积时间下调1-2%</li>
|
|
|
|
|
|
<li><i data-lucide="arrow-up"></i> 腔温上调约2℃</li>
|
|
|
|
|
|
<li><i data-lucide="search"></i> 下批优先复测边缘3点+中心1点</li>
|
|
|
|
|
|
</ul>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
|
|
|
|
|
|
<!-- 观察项解释 -->
|
|
|
|
|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|
|
|
|
|
<h3><i data-lucide="help-circle"></i> 观察项解释</h3>
|
|
|
|
|
|
<div class="grid grid-2" style="margin-top: var(--spacing-md); gap: var(--spacing-lg);">
|
|
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title">❓ 为何是"观察"而非"不合格"</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2; font-size: 14px;">
|
|
|
|
|
|
<p style="line-height: 1.8;">Rs仍在允许范围内，只是接近上限；离散度正常，说明并非局部失控。</p>
|
|
|
|
|
|
<div style="background: var(--bg-semi-dark); padding: var(--spacing-md); border-radius: var(--radius-md); margin-top: var(--spacing-sm);">
|
|
|
|
|
|
<p style="margin: 0; color: var(--text-secondary);">
|
|
|
|
|
|
<i data-lucide="info" style="width: 16px; height: 16px; vertical-align: middle;"></i>
|
|
|
|
|
|
<strong>技术说明：</strong>Rs均值61.1Ω/□，目标60±1.2Ω/□，偏差+1.1Ω/□（约1.8%），仍在规格窗口内。9点离散度2.9Ω/□属于正常工艺波动范围。
|
|
|
|
|
|
</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title">📊 对良率和使用的影响</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2; font-size: 14px;">
|
|
|
|
|
|
<p style="line-height: 1.8;">在当前应用场景下属于可接受波动，不会成为直接的失效风险。</p>
|
|
|
|
|
|
<div style="background: var(--warning-bg, rgba(255, 193, 7, 0.1)); padding: var(--spacing-md); border-radius: var(--radius-md); margin-top: var(--spacing-sm); border-left: 3px solid var(--warning-color, #ffc107);">
|
|
|
|
|
|
<p style="margin: 0; color: var(--text-primary);">
|
|
|
|
|
|
<i data-lucide="alert-triangle" style="width: 16px; height: 16px; vertical-align: middle; color: var(--warning-color);"></i>
|
|
|
|
|
|
<strong>预警：</strong>若下批连续出现同样趋势，可能意味着工艺轻微偏移，需要小范围微调确认。
|
|
|
|
|
|
</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<!-- 复核与跟踪 -->
|
|
|
|
|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|
|
|
|
|
<h3><i data-lucide="search-check"></i> 复核与跟踪</h3>
|
|
|
|
|
|
<div style="margin-top: var(--spacing-md);">
|
|
|
|
|
|
<div class="card" style="margin-bottom: var(--spacing-lg);">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title">✅ 当班复核</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2; font-size: 14px;">
|
|
|
|
|
|
<p>观察片的重点点位已复测，确认属轻微偏高；AI与人工结论一致。</p>
|
|
|
|
|
|
<div class="stats" style="margin-top: var(--spacing-md); gap: var(--spacing-sm);">
|
|
|
|
|
|
<div class="stat-item">
|
|
|
|
|
|
<div class="stat-label">复核方式</div>
|
|
|
|
|
|
<div class="stat-value" style="font-size: 16px;">人工+AI双验证</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="stat-item">
|
|
|
|
|
|
<div class="stat-label">结论一致性</div>
|
|
|
|
|
|
<div class="stat-value" style="font-size: 16px; color: var(--success-color);">100%</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="stat-item">
|
|
|
|
|
|
<div class="stat-label">复核耗时</div>
|
|
|
|
|
|
<div class="stat-value" style="font-size: 16px;">3分钟</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div class="card">
|
|
|
|
|
|
<div class="card-header" style="order: 1;">
|
|
|
|
|
|
<h4 class="card-title">🔄 下批跟踪计划</h4>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
|
|
|
|
|
<div class="grid grid-2" style="gap: var(--spacing-lg);">
|
|
|
|
|
|
<div>
|
|
|
|
|
|
<h5 style="font-size: 15px; font-weight: 600; margin-bottom: var(--spacing-sm);">
|
|
|
|
|
|
<i data-lucide="map-pin" style="width: 18px; height: 18px;"></i> 优先点位
|
|
|
|
|
|
</h5>
|
|
|
|
|
|
<ul class="feature-list" style="font-size: 14px;">
|
|
|
|
|
|
<li><i data-lucide="crosshair"></i> 边缘外环3点（NE、NW、SE）</li>
|
|
|
|
|
|
<li><i data-lucide="crosshair"></i> 中心1点</li>
|
|
|
|
|
|
</ul>
|
|
|
|
|
|
<p style="margin-top: var(--spacing-xs); font-size: 13px; color: var(--text-gray);">
|
|
|
|
|
|
💡 AI已在报告中自动生成对应坐标
|
|
|
|
|
|
</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div>
|
|
|
|
|
|
<h5 style="font-size: 15px; font-weight: 600; margin-bottom: var(--spacing-sm);">
|
|
|
|
|
|
<i data-lucide="git-branch" style="width: 18px; height: 18px;"></i> 顺序建议
|
|
|
|
|
|
</h5>
|
|
|
|
|
|
<ol style="font-size: 14px; color: var(--text-secondary); padding-left: 20px; line-height: 1.8;">
|
|
|
|
|
|
<li>先边缘后中心</li>
|
|
|
|
|
|
<li>若边缘回落而中心不变，优先考虑边缘效应</li>
|
|
|
|
|
|
<li>合格判据：Rs均值回到60±1.2Ω/□内，且9点离散≤上一批离散值+10%即可判定"趋稳"</li>
|
|
|
|
|
|
</ol>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div style="background: var(--accent-bg, rgba(99, 102, 241, 0.1)); padding: var(--spacing-md); border-radius: var(--radius-md); margin-top: var(--spacing-md); border-left: 3px solid var(--accent-primary);">
|
|
|
|
|
|
<p style="margin: 0; font-size: 14px; line-height: 1.6;">
|
|
|
|
|
|
<i data-lucide="target" style="width: 16px; height: 16px; vertical-align: middle; color: var(--accent-primary);"></i>
|
|
|
|
|
|
<strong>跟踪目标：</strong>通过下批4个关键点位的数据变化，快速判断工艺稳定性。若Rs回落且离散度稳定，可维持当前工艺参数；若无改善或继续上升，需启动工艺分析会议，评估是否调整沉积参数。
|
|
|
|
|
|
</p>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
</div>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
|
|
|
|
|
|
<div class="stats" style="margin-top: var(--spacing-xl); display: grid; grid-template-columns: repeat(4, 1fr); gap: var(--spacing-lg); padding: var(--spacing-xl); background: var(--bg-semi-dark); border-radius: var(--radius-lg);">
|
|
|
|
|
|
<div class="stat-item" style="text-align: center; padding: var(--spacing-md); background: var(--bg-card); border-radius: var(--radius-md); border: 1px solid var(--border);">
|
|
|
|
|
|
<div class="stat-label" style="font-size: 14px; color: var(--text-gray); margin-bottom: var(--spacing-xs); text-transform: uppercase; letter-spacing: 0.05em;">批次合格率</div>
|
|
|
|
|
|
<div class="stat-value" style="font-size: var(--text-3xl); font-weight: var(--font-bold); color: var(--success-color, #4caf50); line-height: 1.2;">95%</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<div class="stat-item" style="text-align: center; padding: var(--spacing-md); background: var(--bg-card); border-radius: var(--radius-md); border: 1px solid var(--border);">
|
|
|
|
|
|
<div class="stat-label" style="font-size: 14px; color: var(--text-gray); margin-bottom: var(--spacing-xs); text-transform: uppercase; letter-spacing: 0.05em;">AI可信度</div>
|
|
|
|
|
|
<div class="stat-value" style="font-size: var(--text-3xl); font-weight: var(--font-bold); color: var(--primary); line-height: 1.2;">0.94</div>
|
2025-10-04 04:02:30 +08:00
|
|
|
|
</div>
|
2025-10-10 14:25:07 +08:00
|
|
|
|
<div class="stat-item" style="text-align: center; padding: var(--spacing-md); background: var(--bg-card); border-radius: var(--radius-md); border: 1px solid var(--border);">
|
|
|
|
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<div class="stat-label" style="font-size: 14px; color: var(--text-gray); margin-bottom: var(--spacing-xs); text-transform: uppercase; letter-spacing: 0.05em;">观察片数</div>
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<div class="stat-value" style="font-size: var(--text-3xl); font-weight: var(--font-bold); color: var(--warning-color, #ff9800); line-height: 1.2;">1片</div>
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</div>
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<div class="stat-item" style="text-align: center; padding: var(--spacing-md); background: var(--bg-card); border-radius: var(--radius-md); border: 1px solid var(--border);">
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<div class="stat-label" style="font-size: 14px; color: var(--text-gray); margin-bottom: var(--spacing-xs); text-transform: uppercase; letter-spacing: 0.05em;">不合格片数</div>
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<div class="stat-value" style="font-size: var(--text-3xl); font-weight: var(--font-bold); color: var(--text-gray); line-height: 1.2;">0片</div>
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2025-10-04 04:02:30 +08:00
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</div>
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</div>
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</div>
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</div>
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</section>
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2025-10-10 14:25:07 +08:00
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<!-- AI核心能力展示 -->
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<section class="section">
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<div class="container">
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<div class="expert-intro">
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<h2 class="section-title text-center" style="margin-bottom: var(--spacing-md);">
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<i data-lucide="cpu"></i> AI核心能力
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</h2>
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<p style="text-align: center; color: var(--text-secondary); max-width: 800px; margin: 0 auto;">
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本项目采用先进的AI技术，实现从数据采集到报告生成的全流程自动化，大幅提升检测效率与准确性。
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</p>
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</div>
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<!-- Icon Grid -->
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<div class="icon-grid" style="margin-top: var(--spacing-2xl);">
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<div class="icon-card">
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<div class="icon-card-icon">🧹</div>
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<h4 class="icon-card-title">自动数据清洗</h4>
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<p class="icon-card-value">去噪、校正、标准化</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">🧠</div>
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<h4 class="icon-card-title">智能主判定</h4>
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<p class="icon-card-value">合格/观察/不合格</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">⚖️</div>
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<h4 class="icon-card-title">阈值自动比对</h4>
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<p class="icon-card-value">实时对标工艺窗口</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">📊</div>
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<h4 class="icon-card-title">可信度评估</h4>
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<p class="icon-card-value">0.94平均可信度</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">📈</div>
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<h4 class="icon-card-title">趋势预测</h4>
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<p class="icon-card-value">工艺偏移预警</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">⚠️</div>
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<h4 class="icon-card-title">异常自动预警</h4>
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<p class="icon-card-value">低可信/越界提醒</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">📄</div>
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<h4 class="icon-card-title">报告一键生成</h4>
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<p class="icon-card-value">≤2分钟出具PDF</p>
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</div>
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<div class="icon-card">
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<div class="icon-card-icon">🔄</div>
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<h4 class="icon-card-title">持续学习优化</h4>
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<p class="icon-card-value">模型迭代升级</p>
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</div>
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</div>
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</div>
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</section>
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|
2025-10-04 04:02:30 +08:00
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|
<!-- Footer: 项目成果总结 -->
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<section class="section" style="background: var(--bg-semi-dark); padding: var(--spacing-3xl) 0;">
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<div class="container">
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|
<h2 class="section-title text-center" style="margin-bottom: var(--spacing-2xl);">
|
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<i data-lucide="award"></i> 项目成果总结
|
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</h2>
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<div class="grid grid-3">
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<div class="card">
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<div class="card-header" style="order: 1;">
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<h3 class="card-title">📋 检测覆盖</h3>
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</div>
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<div class="card-body" style="order: 2;">
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<ul class="feature-list">
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<li><i data-lucide="search"></i> 外观全片扫描</li>
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<li><i data-lucide="ruler"></i> 9点厚度测量</li>
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<li><i data-lucide="zap"></i> 9点电阻测试</li>
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<li><i data-lucide="atom"></i> XPS成分抽检</li>
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<li><i data-lucide="image"></i> 4类可视化图表</li>
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<li><i data-lucide="file-text"></i> 结构化AI报告</li>
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<li><i data-lucide="database"></i> 原始数据追溯</li>
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|
<li><i data-lucide="shield-check"></i> 全程质量控制</li>
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|
</ul>
|
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|
</div>
|
|
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</div>
|
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|
|
<div class="card">
|
|
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|
|
<div class="card-header" style="order: 1;">
|
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|
<h3 class="card-title">🎯 核心指标</h3>
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|
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|
</div>
|
|
|
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|
|
<div class="card-body" style="order: 2;">
|
|
|
|
|
|
<ul class="feature-list">
|
|
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|
|
<li><i data-lucide="check-circle"></i> 合格率95%</li>
|
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|
<li><i data-lucide="cpu"></i> AI可信度0.94</li>
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|
<li><i data-lucide="clock"></i> 单片用时≤6分钟</li>
|
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|
<li><i data-lucide="layers"></i> 批次用时1.5小时</li>
|
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<li><i data-lucide="droplet"></i> 颗粒≤35颗/片</li>
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<li><i data-lucide="minimize"></i> 划痕<50μm</li>
|
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<li><i data-lucide="box"></i> 厚度15.0±0.3nm</li>
|
|
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|
<li><i data-lucide="zap"></i> Rs 60±1.2Ω/□</li>
|
|
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|
</ul>
|
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</div>
|
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</div>
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|
<div class="card">
|
|
|
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|
|
<div class="card-header" style="order: 1;">
|
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|
|
<h3 class="card-title">⚙️ AI能力</h3>
|
|
|
|
|
|
</div>
|
|
|
|
|
|
<div class="card-body" style="order: 2;">
|
|
|
|
|
|
<ul class="feature-list">
|
|
|
|
|
|
<li><i data-lucide="wand-2"></i> 自动数据清洗</li>
|
|
|
|
|
|
<li><i data-lucide="brain"></i> 智能主判定</li>
|
|
|
|
|
|
<li><i data-lucide="git-compare"></i> 阈值自动比对</li>
|
|
|
|
|
|
<li><i data-lucide="activity"></i> 可信度评估</li>
|
|
|
|
|
|
<li><i data-lucide="line-chart"></i> 趋势预测</li>
|
|
|
|
|
|
<li><i data-lucide="alert-triangle"></i> 异常自动预警</li>
|
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|
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|
<li><i data-lucide="file-output"></i> 报告一键生成</li>
|
|
|
|
|
|
<li><i data-lucide="repeat"></i> 持续学习优化</li>
|
|
|
|
|
|
</ul>
|
|
|
|
|
|
</div>
|
|
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</div>
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</div>
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|
<div class="text-center" style="margin-top: var(--spacing-2xl); color: var(--text-gray);">
|
|
|
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|
|
<p>🔬 半导体AI综合检测项目圆满完成!</p>
|
|
|
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|
<p style="margin-top: var(--spacing-sm);">© 2024 化工订单班 | AI驱动的智能质检解决方案</p>
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|
</div>
|
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</div>
|
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</section>
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<script src="js/main.js"></script>
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</body>
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</html>
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