642 lines
31 KiB
HTML
642 lines
31 KiB
HTML
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<!DOCTYPE html>
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<html lang="zh-CN">
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<head>
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<meta charset="UTF-8">
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<meta name="viewport" content="width=device-width, initial-scale=1.0">
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<title>半导体AI综合检测项目 - 化工订单班</title>
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<link rel="stylesheet" href="css/styles.css">
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<script src="https://unpkg.com/lucide@latest/dist/umd/lucide.min.js"></script>
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</head>
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<body class="dark-theme">
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<!-- 主题切换按钮 -->
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<div class="theme-toggle">
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<button id="themeToggleBtn" class="theme-toggle-btn">
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<i data-lucide="sun" class="theme-icon theme-icon-light"></i>
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<i data-lucide="moon" class="theme-icon theme-icon-dark"></i>
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</button>
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</div>
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<!-- Hero 区域 -->
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<section class="hero">
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<div class="hero-content">
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<div class="hero-badge">🔬 化工订单班</div>
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<h1 class="hero-title">半导体AI综合检测项目</h1>
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<h2 class="hero-subtitle">300mm硅晶圆 + SiO₂薄膜智能质检</h2>
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<p class="hero-description">
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<i data-lucide="cpu"></i> AI驱动的全流程自动化检测<br>
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<i data-lucide="bot"></i> 4大专业Agent协同作业<br>
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<i data-lucide="check-circle"></i> 95%合格率 + 智能质量预警
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</p>
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</div>
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</section>
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<!-- 导航栏 -->
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<nav class="nav">
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<div class="nav-container">
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<div class="nav-item active">
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<i data-lucide="file-text"></i>
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<span>项目概述</span>
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</div>
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<div class="nav-item">
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<i data-lucide="clipboard-check"></i>
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<span>判定标准</span>
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</div>
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<div class="nav-item">
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<i data-lucide="workflow"></i>
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<span>检测流程</span>
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</div>
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<div class="nav-item">
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<i data-lucide="chart-line"></i>
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<span>检测结果</span>
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</div>
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</div>
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</nav>
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<!-- Section 1: 项目概述 -->
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<section class="section">
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<div class="container">
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<div class="section-header">
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<img src="agent-avatars/质量标准与合规专家.jpg" alt="项目经理" class="agent-avatar">
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<div class="agent-info">
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<div class="agent-name">
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<i data-lucide="briefcase"></i> 项目经理
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</div>
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<h2 class="section-title">项目概述与检测背景</h2>
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</div>
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</div>
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<div class="section-content">
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<div class="expert-intro">
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<h3><i data-lucide="info"></i> 检测背景</h3>
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<p>本项目对单批次 300mm 硅晶圆 + 表面SiO₂薄膜开展一次性质量检测。整套流程由AI引擎主导:负责数据清洗、主判定与自动出具结构化报告;检测员只在低可信或越界时介入复核,最大化保障速度与一致性。</p>
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</div>
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<div class="image-container" style="margin-bottom: var(--spacing-xl);">
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<img data-src="images/检测背景主图.jpg" alt="检测背景" loading="lazy">
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<div class="image-caption">AI驱动的智能检测系统</div>
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</div>
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<div class="grid grid-2">
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<div class="card">
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<div class="card-header">
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<h3 class="card-title">检测目的</h3>
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</div>
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<div class="card-body">
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<ul class="feature-list">
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<li><i data-lucide="check-circle"></i> 外观:识别颗粒、划痕、腐蚀缺陷</li>
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<li><i data-lucide="check-circle"></i> 薄膜:核对厚度均值与均匀性</li>
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<li><i data-lucide="check-circle"></i> 电学:快速评估方块电阻Rs</li>
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<li><i data-lucide="check-circle"></i> 成分:XPS抽检确认O/Si比</li>
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</ul>
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</div>
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</div>
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<div class="card">
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<div class="card-header">
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<h3 class="card-title">检测信息</h3>
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</div>
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<div class="card-body">
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<ul class="feature-list">
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<li><i data-lucide="building"></i> XX半导体第三方实验室</li>
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<li><i data-lucide="calendar"></i> 2024年10月</li>
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<li><i data-lucide="file-text"></i> AI-QC-202410-001</li>
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<li><i data-lucide="package"></i> 300mm P型硅晶圆 20片</li>
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</ul>
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</div>
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</div>
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</div>
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<div class="table-container" style="margin-top: var(--spacing-xl);">
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<table>
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<thead>
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<tr>
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<th>项目</th>
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<th>信息</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>产品</td>
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<td>300mm P型硅晶圆(表面SiO₂薄膜)</td>
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</tr>
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<tr>
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<td>批次/数量</td>
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<td>同批随机抽样20片</td>
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</tr>
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<tr>
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<td>目标规格</td>
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<td>SiO₂ 15.0±0.3nm; Rs 60±1.2Ω/□</td>
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</tr>
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<tr>
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<td>环境</td>
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<td>ISO 5洁净室,温度22±1℃,湿度45±5%</td>
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</tr>
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<tr>
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<td>AI设置</td>
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<td>可信度阈值:≥0.90合格,0.80-0.90观察,<0.80待复核</td>
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</tr>
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</tbody>
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</table>
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</div>
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</div>
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</div>
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</section>
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<!-- Section 2: 判定标准 -->
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<section class="section">
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<div class="container">
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<div class="section-header">
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<img src="agent-avatars/质量标准与合规专家.jpg" alt="质量工程师" class="agent-avatar">
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<div class="agent-info">
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<div class="agent-name">
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<i data-lucide="shield-check"></i> 质量工程师
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</div>
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<h2 class="section-title">检测范围与判定标准</h2>
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</div>
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</div>
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<div class="section-content">
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<div class="expert-intro">
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<h3><i data-lucide="target"></i> 检测对象与项目</h3>
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<p>样品类型:300mm硅晶圆+表面SiO₂薄膜。覆盖项目:外观(颗粒/划痕/腐蚀)、薄膜(厚度与均匀性)、电学(方块电阻Rs)、成分(XPS抽检)。</p>
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</div>
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<div class="image-container" style="margin-bottom: var(--spacing-xl);">
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<img data-src="images/硅晶圆检测项目.jpg" alt="检测项目" loading="lazy">
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<div class="image-caption">硅晶圆检测项目全景</div>
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</div>
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<div class="table-container">
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<table>
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<thead>
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<tr>
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<th>项目</th>
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<th>指标</th>
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<th>判定阈值/范围</th>
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<th>统计口径</th>
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<th>结论规则</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>外观</td>
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<td>颗粒(≥0.3μm)</td>
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<td>≤35颗/片</td>
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<td>每片最大值、总数</td>
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<td>超过即不合格</td>
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</tr>
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<tr>
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<td>外观</td>
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<td>划痕</td>
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<td>>50μm计缺陷</td>
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<td>最大长度</td>
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<td>45-50μm观察</td>
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</tr>
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<tr>
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<td>外观</td>
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<td>腐蚀坑深度</td>
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<td>>10nm不合格</td>
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<td>最大深度</td>
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<td>8-10nm观察;≤8nm合格</td>
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</tr>
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<tr>
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<td>薄膜</td>
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<td>厚度均值</td>
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<td>15.0±0.3nm</td>
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<td>9点均值</td>
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<td>超出窗口即不合格</td>
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</tr>
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<tr>
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<td>薄膜</td>
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<td>均匀性(3σ)</td>
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<td>≤±3%</td>
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<td>9点3σ</td>
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<td>>3%不合格;2.5-3%观察</td>
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</tr>
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<tr>
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<td>电学</td>
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<td>Rs均值</td>
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<td>60±1.2Ω/□</td>
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<td>9点均值</td>
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<td>超出窗口不合格</td>
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</tr>
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<tr>
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<td>成分</td>
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<td>O/Si比</td>
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<td>2.00±0.05</td>
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<td>抽检值</td>
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<td>超出为异常;贴边观察</td>
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</tr>
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<tr>
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<td>成分</td>
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<td>金属污染</td>
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<td><1×10¹⁰atoms/cm²</td>
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<td>抽检值</td>
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<td>超阈即异常</td>
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</tr>
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</tbody>
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</table>
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</div>
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<div class="stats" style="margin-top: var(--spacing-xl);">
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<div class="stat-item">
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<div class="stat-label">判定优先级</div>
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<div class="stat-value">外观 > 薄膜 > 电学 > 成分</div>
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</div>
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<div class="stat-item">
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<div class="stat-label">AI参与方式</div>
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<div class="stat-value">自动阈值比对</div>
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</div>
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<div class="stat-item">
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<div class="stat-label">人工复核触发</div>
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<div class="stat-value">临界/低可信</div>
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</div>
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</div>
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</div>
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</div>
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</section>
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<!-- Section 3: 检测流程 -->
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<section class="section">
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<div class="container">
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<div class="section-header">
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<img src="agent-avatars/检测工程师1+2.jpg" alt="AI系统工程师" class="agent-avatar">
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<div class="agent-info">
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<div class="agent-name">
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<i data-lucide="bot"></i> AI系统工程师
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</div>
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<h2 class="section-title">检测流程与AI方法</h2>
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</div>
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</div>
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<div class="section-content">
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<div class="expert-intro">
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<h3><i data-lucide="workflow"></i> 流程总览</h3>
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<p>AI数据采集 → AI清洗数据 → AI主判定 → AI对标阈值 → 必要时人工复核 → 自动生成报告。单片目标用时≤6分钟,批次(20片)约1.5小时完成核心判定。</p>
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</div>
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<div class="image-container" style="margin-bottom: var(--spacing-xl);">
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<img data-src="images/光学镜头检测硅晶圆示意图.jpg" alt="检测流程" loading="lazy">
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<div class="image-caption">光学镜头检测硅晶圆示意</div>
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</div>
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<div class="grid grid-4">
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<div class="card">
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<div class="image-container">
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<img data-src="images/外观热力图(颗粒划痕腐蚀).jpg" alt="外观热力图" loading="lazy">
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</div>
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<div class="card-header">
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<h3 class="card-title">外观热力图</h3>
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</div>
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<div class="card-body">
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<p>整片俯视图+网格热区,颗粒/划痕/腐蚀坑分类显示,颜色分级标注严重度。</p>
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</div>
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</div>
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<div class="card">
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<div class="image-container">
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<img data-src="images/厚度分布图.jpg" alt="厚度分布图" loading="lazy">
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</div>
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<div class="card-header">
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<h3 class="card-title">厚度分布图</h3>
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</div>
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<div class="card-body">
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|
|
<p>9点热力格,均值、3σ、偏移率统计,边缘敏感性自动标注。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="image-container">
|
|||
|
|
<img data-src="images/电学对比图.jpg" alt="电学对比图" loading="lazy">
|
|||
|
|
</div>
|
|||
|
|
<div class="card-header">
|
|||
|
|
<h3 class="card-title">电学对比图</h3>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body">
|
|||
|
|
<p>AI预测vs实测散点图,误差统计,置信区间可视化展示。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="image-container">
|
|||
|
|
<img data-src="images/成分抽检卡片.jpg" alt="成分抽检" loading="lazy">
|
|||
|
|
</div>
|
|||
|
|
<div class="card-header">
|
|||
|
|
<h3 class="card-title">成分抽检卡片</h3>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body">
|
|||
|
|
<p>O/Si比值、金属污染状态,峰位截图,采样位置追溯。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|||
|
|
<h3><i data-lucide="cpu"></i> AI判定规则</h3>
|
|||
|
|
<div class="grid grid-3" style="margin-top: var(--spacing-md);">
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h4 class="card-title">≥0.90且达标 → 合格</h4>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<p>自动出报告并归档,无需人工处理。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h4 class="card-title">0.80-0.90 → 观察</h4>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<p>自动生成备注与关注点,坐标放入下批复测清单。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h4 class="card-title"><0.80或超限 → 待复核</h4>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<p>自动通知检测员复核,复核前不建议放行。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="stats" style="margin-top: var(--spacing-xl);">
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">单片用时</div>
|
|||
|
|
<div class="stat-value single-time">0分钟</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">批次用时(20片)</div>
|
|||
|
|
<div class="stat-value batch-time">0小时</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">AI可信度</div>
|
|||
|
|
<div class="stat-value ai-confidence">0%</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">异常复核</div>
|
|||
|
|
<div class="stat-value">3-5分钟/片</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</section>
|
|||
|
|
|
|||
|
|
<!-- Section 4: 检测结果 -->
|
|||
|
|
<section class="section">
|
|||
|
|
<div class="container">
|
|||
|
|
<div class="section-header">
|
|||
|
|
<img src="agent-avatars/检测技术员.jpg" alt="数据分析师" class="agent-avatar">
|
|||
|
|
<div class="agent-info">
|
|||
|
|
<div class="agent-name">
|
|||
|
|
<i data-lucide="chart-line"></i> 数据分析师
|
|||
|
|
</div>
|
|||
|
|
<h2 class="section-title">检测结果与数据分析</h2>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="section-content">
|
|||
|
|
<div class="expert-intro">
|
|||
|
|
<h3><i data-lucide="clipboard-check"></i> 批次摘要</h3>
|
|||
|
|
<p>本批共20片晶圆,全部完成外观、厚度、Rs三项检测;随机抽取3片补做XPS成分核验。完成度100%,无漏测、无中断记录。总体判定:合格19片、观察1片、不合格0片。</p>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="image-container" style="margin-bottom: var(--spacing-xl);">
|
|||
|
|
<img data-src="images/检测结果主图.jpg" alt="检测结果" loading="lazy">
|
|||
|
|
<div class="image-caption">检测结果主图</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="table-container">
|
|||
|
|
<table>
|
|||
|
|
<thead>
|
|||
|
|
<tr>
|
|||
|
|
<th>判定</th>
|
|||
|
|
<th>片数</th>
|
|||
|
|
<th>占比</th>
|
|||
|
|
<th>主要原因/特征</th>
|
|||
|
|
<th>处置</th>
|
|||
|
|
</tr>
|
|||
|
|
</thead>
|
|||
|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>19</td>
|
|||
|
|
<td>95%</td>
|
|||
|
|
<td>指标均在阈值内;外观颗粒小、分散</td>
|
|||
|
|
<td>直接归档</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>观察</td>
|
|||
|
|
<td>1</td>
|
|||
|
|
<td>5%</td>
|
|||
|
|
<td>Rs接近上限,离散正常;外观、厚度均达标</td>
|
|||
|
|
<td>下批优先复测</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>不合格</td>
|
|||
|
|
<td>0</td>
|
|||
|
|
<td>0%</td>
|
|||
|
|
<td>—</td>
|
|||
|
|
<td>—</td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="table-container" style="margin-top: var(--spacing-xl);">
|
|||
|
|
<table>
|
|||
|
|
<thead>
|
|||
|
|
<tr>
|
|||
|
|
<th>指标</th>
|
|||
|
|
<th>结果</th>
|
|||
|
|
<th>阈值</th>
|
|||
|
|
<th>判定</th>
|
|||
|
|
<th>备注</th>
|
|||
|
|
</tr>
|
|||
|
|
</thead>
|
|||
|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>颗粒(≥0.3μm,颗/片)</td>
|
|||
|
|
<td>24</td>
|
|||
|
|
<td>≤35</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>主要集中在3象限外环</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>划痕(最大长度,μm)</td>
|
|||
|
|
<td>48</td>
|
|||
|
|
<td>>50计缺陷</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>单条、细长型,非功能区</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>腐蚀坑深度(nm)</td>
|
|||
|
|
<td>8.6</td>
|
|||
|
|
<td>≤10</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>无环形腐蚀迹象</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>SiO₂厚度均值(nm)</td>
|
|||
|
|
<td>15.07</td>
|
|||
|
|
<td>15.0±0.3</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>偏移率+0.47%</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>厚度均匀性3σ(%)</td>
|
|||
|
|
<td>±2.6</td>
|
|||
|
|
<td>≤±3.0</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>边缘敏感:否</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Rs均值(Ω/□)</td>
|
|||
|
|
<td>61.1</td>
|
|||
|
|
<td>60±1.2</td>
|
|||
|
|
<td>观察</td>
|
|||
|
|
<td>+1.1(略高),离散2.9Ω/□</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>XPS O/Si原子比</td>
|
|||
|
|
<td>2.02</td>
|
|||
|
|
<td>2.00±0.05</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>3片抽检均正常</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>金属污染(atoms/cm²)</td>
|
|||
|
|
<td><7×10⁹</td>
|
|||
|
|
<td><1×10¹⁰</td>
|
|||
|
|
<td>合格</td>
|
|||
|
|
<td>未见可疑峰</td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="expert-intro" style="margin-top: var(--spacing-xl);">
|
|||
|
|
<h3><i data-lucide="lightbulb"></i> 结论与建议</h3>
|
|||
|
|
<div class="grid grid-2" style="margin-top: var(--spacing-md);">
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h4 class="card-title">总体判定</h4>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<p>最终结论:<strong>合格</strong>。本批20片中,仅1片进入观察带(Rs均值略高但未越界),其余指标均在阈值内。AI主判定平均可信度0.94,异常触发的人工复核与AI结果一致。</p>
|
|||
|
|
<p style="margin-top: var(--spacing-sm);">放行建议:本批可整体放行。对"观察片"在生产流转单上加注"下批优先复测"标识。</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h4 class="card-title">快速优化建议</h4>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<p>若后续批次仍出现Rs略高,可尝试:</p>
|
|||
|
|
<ul class="feature-list" style="margin-top: var(--spacing-sm);">
|
|||
|
|
<li><i data-lucide="arrow-down"></i> 沉积时间下调1-2%</li>
|
|||
|
|
<li><i data-lucide="arrow-up"></i> 腔温上调约2℃</li>
|
|||
|
|
<li><i data-lucide="search"></i> 下批优先复测边缘3点+中心1点</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="stats" style="margin-top: var(--spacing-xl);">
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">批次合格率</div>
|
|||
|
|
<div class="stat-value pass-rate">0%</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">AI可信度</div>
|
|||
|
|
<div class="stat-value">0.94</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">观察片数</div>
|
|||
|
|
<div class="stat-value">1片</div>
|
|||
|
|
</div>
|
|||
|
|
<div class="stat-item">
|
|||
|
|
<div class="stat-label">不合格片数</div>
|
|||
|
|
<div class="stat-value">0片</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</section>
|
|||
|
|
|
|||
|
|
<!-- Footer: 项目成果总结 -->
|
|||
|
|
<section class="section" style="background: var(--bg-semi-dark); padding: var(--spacing-3xl) 0;">
|
|||
|
|
<div class="container">
|
|||
|
|
<h2 class="section-title text-center" style="margin-bottom: var(--spacing-2xl);">
|
|||
|
|
<i data-lucide="award"></i> 项目成果总结
|
|||
|
|
</h2>
|
|||
|
|
|
|||
|
|
<div class="grid grid-3">
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h3 class="card-title">📋 检测覆盖</h3>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<ul class="feature-list">
|
|||
|
|
<li><i data-lucide="search"></i> 外观全片扫描</li>
|
|||
|
|
<li><i data-lucide="ruler"></i> 9点厚度测量</li>
|
|||
|
|
<li><i data-lucide="zap"></i> 9点电阻测试</li>
|
|||
|
|
<li><i data-lucide="atom"></i> XPS成分抽检</li>
|
|||
|
|
<li><i data-lucide="image"></i> 4类可视化图表</li>
|
|||
|
|
<li><i data-lucide="file-text"></i> 结构化AI报告</li>
|
|||
|
|
<li><i data-lucide="database"></i> 原始数据追溯</li>
|
|||
|
|
<li><i data-lucide="shield-check"></i> 全程质量控制</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h3 class="card-title">🎯 核心指标</h3>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<ul class="feature-list">
|
|||
|
|
<li><i data-lucide="check-circle"></i> 合格率95%</li>
|
|||
|
|
<li><i data-lucide="cpu"></i> AI可信度0.94</li>
|
|||
|
|
<li><i data-lucide="clock"></i> 单片用时≤6分钟</li>
|
|||
|
|
<li><i data-lucide="layers"></i> 批次用时1.5小时</li>
|
|||
|
|
<li><i data-lucide="droplet"></i> 颗粒≤35颗/片</li>
|
|||
|
|
<li><i data-lucide="minimize"></i> 划痕<50μm</li>
|
|||
|
|
<li><i data-lucide="box"></i> 厚度15.0±0.3nm</li>
|
|||
|
|
<li><i data-lucide="zap"></i> Rs 60±1.2Ω/□</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="card">
|
|||
|
|
<div class="card-header" style="order: 1;">
|
|||
|
|
<h3 class="card-title">⚙️ AI能力</h3>
|
|||
|
|
</div>
|
|||
|
|
<div class="card-body" style="order: 2;">
|
|||
|
|
<ul class="feature-list">
|
|||
|
|
<li><i data-lucide="wand-2"></i> 自动数据清洗</li>
|
|||
|
|
<li><i data-lucide="brain"></i> 智能主判定</li>
|
|||
|
|
<li><i data-lucide="git-compare"></i> 阈值自动比对</li>
|
|||
|
|
<li><i data-lucide="activity"></i> 可信度评估</li>
|
|||
|
|
<li><i data-lucide="line-chart"></i> 趋势预测</li>
|
|||
|
|
<li><i data-lucide="alert-triangle"></i> 异常自动预警</li>
|
|||
|
|
<li><i data-lucide="file-output"></i> 报告一键生成</li>
|
|||
|
|
<li><i data-lucide="repeat"></i> 持续学习优化</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="text-center" style="margin-top: var(--spacing-2xl); color: var(--text-gray);">
|
|||
|
|
<p>🔬 半导体AI综合检测项目圆满完成!</p>
|
|||
|
|
<p style="margin-top: var(--spacing-sm);">© 2024 化工订单班 | AI驱动的智能质检解决方案</p>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</section>
|
|||
|
|
|
|||
|
|
<script src="js/main.js"></script>
|
|||
|
|
</body>
|
|||
|
|
</html>
|